Abstract
This study has clarified the performance evaluation simulation of the optical splitters integrated with unidirectional fiber elements. The simulative performance evaluation of electrostatic, thermal, and piezoelectric actuation based micro electro mechanical systems. The force against the displacement based electrostatic and elastic forces for parallel plate actuator is simulated by MEMSover simulation software. The voltage with angular displacement for a torsion bar actuator is clarified. Besides the lateral displacement against voltage for a comb drive actuator is reported. The dependence of the film thickness on the deflection of a bimetallic cantilever, the dependence of passive beam length on deflection of a bimorph actuator and the transient response of a bent beam actuator are demonstrated. Moreover the piezoelectric actuator force against applied voltage and the piezoelectric actuator displacement against applied voltage variations are reported.
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Author contributions: All the authors have accepted responsibility for the entire content of this submitted manuscript and approved submission.
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Research funding: None declared.
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Conflict of interest statement: The authors declare no conflicts of interest regarding this article.
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