In clinical use of stereotactic radiosurgery, the measurement of the dose distribution for narrow beams of high energy X-ray is necessary and fundamental study. Comparative study in the measurement of the dose distribution for narrow beams was performed using diode detector, ionization chambers (0.6, 0.2 and 0.0092ml) and film. Tissue peak dose ratio (TPR) measured by film relatively well agreed with TPR measured by diode detector and ionization chambers. Percentage depth dose (PDD) was calculated by TPR. The dose profile measured by film also well agreed with the dose profiles measured by 0.0092ml ionization chamber and thermoluminescence dosimeter (TLD). In the measurement of the does profile for narrow beams, film dosimetry is most appropriate method with accuracy as same as small volume ionization chamber and with simplicity.