Evaluation of Wafer Drying Methods for GIGA-LEVEL Device Fabrication
p.67
p.67
Surfactionated Rinse against Pattern Collapse and Defectivity in 193nm Lithography
p.71
p.71
Performance of a Linear Single Wafer IPA Vapour Based Drying System
p.75
p.75
Effective Rinse Aiming at Water-Mark-Free Drying for Single-Spin Wet Cleaning Process
p.79
p.79
Insights into Watermark Formation and Control
p.83
p.83
Occurrence of Arsenic-Based Defects and Techniques for Their Elimination
p.87
p.87
Selective Wet Removal of Hf-Based Layers and Post-Dry Etch Residues in High-k and Metal Gate Stacks
p.93
p.93
HF Based Solutions for HfO2 Removal; Effect of pH and Temperature on HfO2: SiO2 Etch Selectivity
p.97
p.97
Selective Si3N4 Etch in Single Wafer Application
p.103
p.103
Insights into Watermark Formation and Control
Abstract:
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Info:
Periodical:
Solid State Phenomena (Volumes 103-104)
Pages:
83-86
Citation:
Online since:
April 2005
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Keywords:
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