Modified Epitaxial Graphene on SiC for Extremely Sensitive and Selective Gas Sensors

Jens Eriksson; Donatella Puglisi; Carl Strandqvist; Rickard Gunnarsson; Sebastian Ekeroth; Ivan G. Ivanov; Ulf Helmersson; Kajsa Uvdal; Rositza Yakimova; Anita Lloyd Spetz

doi:10.4028/www.scientific.net/MSF.858.1145

Paper Titles

Interfacial Disorder of Graphene Grown at High Temperatures on 4H-SiC(000-1)
p.1129

Wafer-Scale Graphene on 4-Inch SiC
p.1133

Hot Electron Transistors Based on Graphene/AlGaN/GaN Vertical Heterostructures
p.1137

Amplification in Graphene Nanoribbon Junctions
p.1141

Modified Epitaxial Graphene on SiC for Extremely Sensitive and Selective Gas Sensors
p.1145

Highly Sensitive NO₂ Graphene Sensor Made on SiC Grown in Ta Crucible
p.1149

Graphene-Silicon Heterojunction Infrared Photodiode at 1.3/1.55 μm
p.1153

Abnormal Raman Spectral Variation with Excitation Wavelength in Boron-Doped Single-Crystalline Diamond
p.1158

Development of GaN-Based Gate-Injection Transistors and its Power Switching Application
p.1165

HomeMaterials Science ForumMaterials Science Forum Vol. 858Modified Epitaxial Graphene on SiC for Extremely...

Modified Epitaxial Graphene on SiC for Extremely Sensitive and Selective Gas Sensors

Abstract:

Two-dimensional materials offer a unique platform for sensing where extremely high sensitivity is a priority, since even minimal chemical interaction causes noticeable changes in electrical conductivity, which can be used for the sensor readout. However, the sensitivity has to be complemented with selectivity, and, for many applications, improved response- and recovery times are needed. This has been addressed, for example, by combining graphene (for sensitivity) with metal/oxides (for selectivity) nanoparticles (NP). On the other hand, functionalization or modification of the graphene often results in poor reproducibility. In this study, we investigate the gas sensing performance of epitaxial graphene on SiC (EG/SiC) decorated with nanostructured metallic layers as well as metal-oxide nanoparticles deposited using scalable thin-film deposition techniques, like hollow-cathode pulsed plasma sputtering. It is demonstrated that under the right modification conditions the electronic properties of the surface remain those of graphene, while the surface chemistry can be tuned to improve sensitivity, selectivity and speed of response to several gases relevant for air quality monitoring and control, such as nitrogen dioxide, benzene, and formaldehyde.