Technological Parameters and Electrical Properties of Ti/TiN Multilayer Films Prepared by Magnetron Sputtering

Min Hu; Ying Liu; Zhen Quan Lai

doi:10.4028/www.scientific.net/MSF.654-656.1752

Paper Titles

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Deposition of GaN Films on Freestanding CVD Thick Diamond Films
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The Preparation for Cu(Sn) Films of Barrierless Interconnection
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The Effects of Substrate Temperature on the Composition and IR Transmission Properties of Germanium Carbon Films Deposited by Reactive RF Magnetron Sputtering
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Technological Parameters and Electrical Properties of Ti/TiN Multilayer Films Prepared by Magnetron Sputtering
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Investigation on the Mechanical Properties of Molybdenum-Doped Zinc Oxide Transparent Thin Film by Sputtering Technique
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Preparation and Characterization on Cellulose Nanofiber Film
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Effect of Iodine Doping on Surface and Optical Properties of Polyterpenol Thin Films
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Triangular Dislocation Loop Model for Surface Displacement in Indented Thin Films
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Technological Parameters and Electrical Properties of Ti/TiN Multilayer Films Prepared by Magnetron Sputtering

Abstract:

A series of Ti/TiN multilayer films was deposited on Si substrates by DC reactive magnetron sputtering process. The influence of sputtering current density and substrate temperature on cycle membrane structure and its electrical properties was investigated in this study. The results show that: when the current density is 0.4A, the sheet resistance and electrical resistivity of the film are of the minimum value. The sheet resistance and electrical resistivity of the film decrease with an increase of substrate temperature. Therefore, sputtering current density should be controlled between 0.3-0.4A, while the substrate temperature should be above 400°C. For a given modulation period and modulation ratio, with the change of number of cycles the films can present a unique set of colours, and its electrical resistivity decreases with an increase in the number of cycles. When the number of cycles is greater than 4, the sheet resistance is significantly reduced, and when the number is greater than 15, the prepared films come off. To keep the number of cycles at five and change the modulation period, it is shown that a minimum electrical resistivity exists.