Micropipe Formation Model via Surface Step Interaction
p.99
p.99
Self-Healing Phenomenon of Micropipes in Silicon Carbide
p.103
p.103
A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth
p.107
p.107
Dislocation Constraint by Etch-Back Process of Seed Crystal in SiC Bulk Crystal Growth
p.111
p.111
The Effect of Nitrogen on Crystal Growth of SiC on (11-20) Substrates
p.115
p.115
Temperature Dependence of Sublimation Growth of 6H-SiC on (11-20) Substrates
p.119
p.119
The Development of 4H-SiC {03-38} Wafers
p.123
p.123
Incorporation of Boron and the Role of Nitrogen as a Compensation Source in SiC Bulk Crystal Growth
p.127
p.127
Aluminum Doping of 6H- and 4H-SiC with a Modified PVT Growth Method
p.131
p.131
The Effect of Nitrogen on Crystal Growth of SiC on (11-20) Substrates
Abstract:
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Info:
Periodical:
Materials Science Forum (Volumes 389-393)
Pages:
115-118
Citation:
Online since:
April 2002
Keywords:
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