Mechanisms of Heavy Ion-Induced Single Event Burnout in 4H-SiC Power MOSFETs

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Abstract:

This paper describes the mechanisms behind the failure of silicon carbide (SiC) Power MOSFETs (metal oxide semiconductor field effect transistors) when struck by a heavy ion. The modeled device is designed to simulate a commercially available 1200 V power MOSFET under the strike of a silver ion with a Linear Energy Transfer (LET) of 46 MeV-cm2/mg commonly used in single event effect (SEE) testing. The device is shown in simulation to fail near 500 V, which is in close agreement to experiments. The failure occurs near the interface between the epitaxial layer and the substrate layer due to the rapid increase of the electric field in that region and destruction of the device from impact ionization. Two improved designs were proposed and investigated that would help to mitigate the electric field in these regions and improve the device’s tolerance to single-event burnout (SEB). The new designs increased the voltage at which SEB occurs from 500 V to over 900 V and increased the specific on-resistance (Ron,sp) by only 5%.

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Periodical:

Materials Science Forum (Volume 1004)

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889-896

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Online since:

July 2020

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[1] T. Nitta et al., Cosmic Ray Failure Mechanism and Critical Factors for 3.3kV Hybrid SiC Modules, in PCIM Europe 2016; International Exhibition and Conference Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, Nuremberg, Germany, 566.

Google Scholar

[2] A. F. Witulski et al., Single-Event Burnout Mechanisms in SiC Power MOSFETs, IEEE Trans. Nucl. Sci. 65, 256 (2018).

Google Scholar

[3] X. Zhu et al., Radiation Hardness Study on SiC Power MOSFETs, ICSCRM (2017).

Google Scholar

[4] T. Shoji, S. Nishida, K. Hamada, and H. Tadano, Experimental and simulation studies of neutron-induced single-event burnout in SiC power diodes, Japanese J. Appl. Phys. 53, 04EP03 (2014).

DOI: 10.7567/jjap.53.04ep03

Google Scholar

[5] D. J. Lichtenwalner et al., Reliability of SiC Power Devices against Cosmic Ray Neutron Single-Event Burnout, Materials Science Forum 924, 559 (2018).

DOI: 10.4028/www.scientific.net/msf.924.559

Google Scholar

[6] S.-H. Ryu et al., Development of 1200 V, 3.7 mΩ-cm2 4H-SiC DMOSFETs for Advanced Power Applications, Materials Science Forum 717, 1059 (2012).

DOI: 10.4028/www.scientific.net/msf.717-720.1059

Google Scholar

[7] Sentaurus Device User Guide, Synopsys, Mountain View, CA, USA, (2014).

Google Scholar

[8] C. J. Werner et al., MCNP6.2 Release Notes, Los Alamos National Laboratory, report LA_UR-18-20808 (2018).

Google Scholar

[9] D. K. Avasthi, G. K. Mehta, Ion Matter Interaction, in Swift Heavy Ions for Materials Engineering and Nanostructuring, 145, 47 (2011).

DOI: 10.1007/978-94-007-1229-4_2

Google Scholar

[10] S. Kuboyama et al., Anomalous Charge Collection in Silicon Carbide Schottky Barrier Diodes and Resulting Permanent Damage and Single-Event Burnout, IEEE Trans. Nucl. Sci. 53, 3343 (2006).

DOI: 10.1109/tns.2006.885165

Google Scholar

[11] J. A. McPherson et al., Heavy Ion Transport Modeling for Single-Event Burnout in Sic-Based Power Devices, IEEE Trans. Nucl. Sci. 66, 474 (2019).

DOI: 10.1109/tns.2018.2880865

Google Scholar

[12] M. Lades, Modeling and Simulation of Wide Bandgap Semiconductor Devices: 4H/6H-SiC, Ph.D. Dissertation Technische Universität München (2000).

Google Scholar

[13] H. Niwa, J. Suda, and T. Kimoto, Temperature Dependence of Impact Ionization Coefficients in 4H-SiC, Materials Science Forum 778, 461 (2014).

DOI: 10.4028/www.scientific.net/msf.778-780.461

Google Scholar

[14] O. Nilsson et al., Determination of the thermal diffusivity and conductivity of monocrystalline silicon carbide (300-2300 K), High Temperatures-High Pressures 29, 73 (1997).

DOI: 10.1068/htec142

Google Scholar

[15] Y. S. Touloukian and E. H. Buyco, Specific Heat Nonmetallic Solids, in Thermophysical Properties of Matter, 5, 448 (1970).

Google Scholar