Highly Sensitive H2 Sensors Based on Pd- and PdO-Decorated TiO2 Thin Films at Low-Temperature Operation

Benjarong Samransuksamer; Tula Jutarosaga; Mati Horprathum; Anurat Wisitsoraat; Pitak Eiamchai; Saksorn Limwichean; Viyapol Patthanasettakul; Chanunthorn Chananonnawathorn; Pongpan Chindaudom

doi:10.4028/www.scientific.net/KEM.675-676.277

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 675-676Highly Sensitive H2 Sensors Based on Pd- and...

Highly Sensitive H₂ Sensors Based on Pd- and PdO-Decorated TiO₂ Thin Films at Low-Temperature Operation

Abstract:

Abstract In this work, the low-temperature H₂-sensing properties of palladium (Pd) and palladium oxide (PdO) nanoparticles decorated titanium dioxide (TiO₂) thin film were studied. The TiO₂ thin films were prepared by the dc reactive magnetron sputtering. The Pd and PdO nanoparticles were sputtered on the top surface of TiO₂ surface in order to enhance the sensitivity to the H₂ gas. Morphologies, crystal structures, and chemical element of the examiner samples were investigated by the field-emission scanning electron microscopy (FE-SEM), grazing-incident X-ray diffraction (GIXRD), and X-ray photoelectron spectroscopy (XPS), respectively. The effects of the Pd and PdO nanoparticles on H₂-sensing performance of TiO₂ were investigated over a low concentration range of 150-3,000 ppm H₂ at 50-250°C-operating temperatures. This result exhibited that the PdO decorated on TiO₂ surface showed very high response to H₂ at a low operating temperature of 150°C.

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Periodical:

Key Engineering Materials (Volumes 675-676)

Pages:

277-280

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.675-676.277

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Online since:

January 2016

Authors:

Benjarong Samransuksamer*, Tula Jutarosaga, Mati Horprathum, Anurat Wisitsoraat, Pitak Eiamchai, Saksorn Limwichean, Viyapol Patthanasettakul, Chanunthorn Chananonnawathorn, Pongpan Chindaudom

Keywords:

H₂ Sensor, Palladium, Palladium Oxide, Sputtering, Titanium Dioxide Thin Film

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References

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