Numerical Study of a 3-Axis Stage for Application of Fast Tool Servo

Yung Tien Liu; Bo Jheng Li

doi:10.4028/www.scientific.net/KEM.625.219

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 625Numerical Study of a 3-Axis Stage for Application...

Numerical Study of a 3-Axis Stage for Application of Fast Tool Servo

Abstract:

In this paper, a 3-axis stage consisted of a XY stage and Z-axis feeding tool holder is proposed for the application of fast tool servo (FTS). The XY stage actuated by six piezoelectric (PZT) actuators is designed with symmetric flexural hinges featuring low interference motions, high stiffness, and fast response. Numerical design using the finite element method (FEM) was conducted to investigate the steady characteristics (displacement, stiffness, stress, and strain) and dynamic characteristic of resonance frequency. According to calculation results, the major characteristics obtained along XYZ axes are as follows: displacements induced are 10.06, 10.28, and 20.31 μm due to the applied voltage being 50 V; stiffness are 112.84, 110.31, and 223.34 kN/mm; the maximum stresses at the hinges are 9.78, 10.9, and 100.56 N/mm², which are lower than the allowable stress of aluminum used; and the resonant frequencies are 1.0, 0.64, and 0.4 kHz, respectively. Experimental examinations regarding to the resonant frequencies were performed with a maximum deviation of 16% along the Z-axis compared to the simulation result. As a result of the investigation, it is expected that the 3-axis stage can be effectively applied to implement a FTS.

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Periodical:

Key Engineering Materials (Volume 625)

Pages:

219-223

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.625.219

Citation:

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Online since:

August 2014

Authors:

Yung Tien Liu*, Bo Jheng Li

Keywords:

Asymmetric-Axis, Fast Tool Servo, Finite Element Method (FEM), Flexural Hinge, Micro-Lens Array, Piezoelectric

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* - Corresponding Author

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