Fabrication of Microstructured Surfaces by Five-Axis Ultra Precision Machine Tool

Dong Xu Wu; Guo Li; Bo Wang; Zheng Qiao; Lei Lv

doi:10.4028/www.scientific.net/KEM.625.187

Paper Titles

Dynamics Model of Micro-Displacement Stage Based on High-Frequency
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Estimation of Micro-Hole Shape in Laser Direct Drilling of High Heat Radiation Typed Printed Circuit Boards (Process Monitoring with a High Speed Camera)
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Experiment Study of the Fast Tool Servo (FTS) by Laser Interferometer
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Fabrication of Comb Shape of Leading Edge Wing of Dragonfly
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Fabrication of Microstructured Surfaces by Five-Axis Ultra Precision Machine Tool
p.187

Finishing of 4H-SiC (0001) by Combination of Thermal Oxidation and Abrasive Polishing
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Improved GZO Thin Film Properties with SiO_x Buffer Layer by Atmospheric Pressure Plasma Deposition
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Influence of Machining Characteristics on Ultra-Precision Cutting of Aluminum Alloys
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Influences of Closed Loop Control Componentson the Performance of Ultra-Precision Machines
p.207

HomeKey Engineering MaterialsKey Engineering Materials Vol. 625Fabrication of Microstructured Surfaces by...

Fabrication of Microstructured Surfaces by Five-Axis Ultra Precision Machine Tool

Abstract:

In this paper, a five-axis ultra precision machine tool for fabrication of microstructured surfaces is presented. This machine consists of two rotary axes (C&B) and three linear axes (X&Y&Z). High precision aerostatic bearing and torque motor are adopted in C axis (main spindle) and B axis. X axis and Z axis use the hydrostatic guideway and are driven by linear motors. Y axis is driven by torque motor and precision ball screw. This machine is able to realize multiple processing methods, including ultra precision diamond turning, ultra precision milling, fly-cutting, fast tool servo and slow tool servo diamond turning.Furthermore, a large number of experiment researches are carried out. Some typical microstructure surfaces are manufactured, for sinusoidal grid surface, the surface roughness Ra is 11.9nm, which is machined by slow tool servo diamond turning. Micro pyramid array surface is fabricated by using fly-cutting, which performs well both in the profile accuracy and the repeatability. These experiment researches prove that this ultra precision machine is superior in accuracy and system reliability.

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Periodical:

Key Engineering Materials (Volume 625)

Pages:

187-191

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.625.187

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Online since:

August 2014

Authors:

Dong Xu Wu, Guo Li, Bo Wang*, Zheng Qiao, Lei Lv

Keywords:

Fly-Cutting, Microstructured Surface, Slow Tool Servo, Ultra-Precision Machining

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* - Corresponding Author

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