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Aerosol-Assisted CVD of SnO2 Thin Films for the Room-Temperature Detection of Hydrogen Sulfide

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Abstract:

High-quality SnO2 thin-film materials capable of detecting H2S gas of low concentrations at room temperature was demonstrated in this paper. We employed aerosol-assisted chemical vapor deposition process for the deposition of SnO2 thin films on alumina substrates with pre-patterned electrodes. The gas-sensing performances of the films prepared under different deposition conditions were systematically compared and analyzed. When SnCl2ยท2H2O was used as the precursor, a response sensitivity of 98.4 toward 50 ppm of H2S at room temperature was achieved. At room temperatures, the resistance upon the H2S gas exposure could recover to 90% of the initial resistance of the sensor when the H2S gas flow was turned off.

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Periodical:

Key Engineering Materials (Volume 543)

Pages:

422-425

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.543.422

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Cite this paper

Online since:

March 2013

Authors:

Huan Liu, Min Li, Jiu Xiao Wan, Jun Zhao, Qiu Yun Fu, Shu Ping Gong, Shu Xi Wu, Yun Xiang Hu, Dong Xiang Zhou

Keywords:

AACVD, Gas Sensor, Room Temperature, TiN Oxide

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