Fabrication of Silicon Nano-wire by Oxidation

Xiao Fei Wang; Yu Fei Zhang; Kan Yu; Xiao Mei Yu

doi:10.4028/www.scientific.net/KEM.483.565

Paper Titles

Design of MMFCS for MAV Based on MEMS Sensor
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Improvement on Mechanical and Piezoresistivity Properties of Cementitious Binder by Using Surface Oxidized Multi-Wall Carbon Nanotubes
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Biocompatibility Study of Mn_0.5Zn_0.5Fe₂O₄ Magnetic Nanoparticles
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Fabrication and Characterization of Cobalt Nanostructure-Based Microelectrodes for Phosphate Detection
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Fabrication of Silicon Nano-wire by Oxidation
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DFT Study of Structure, Electronic, Optical and Magnetic Properties of ZnO and Cu-Doped ZnO Clusters
p.569

Theoretic Study of the Structures and Electric Properties of N-Doped InSb Nanoclusters
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Effect of Compressive Strain on Electrical Resistivity of Carbon Nanotube Cement-Based Composites
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Effect of Wet Etching Parameter on the Diameter and Length of Silicon Nanowires
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 483Fabrication of Silicon Nano-wire by Oxidation

Fabrication of Silicon Nano-wire by Oxidation

Abstract:

In this paper, we report a method of fabricating silicon nano-wire based on thermal oxidation technique. In this method, we first fabricate a wider structure with traditional lithography, and then use a layer of silicon nitride as mask to oxidize silicon. At the same time, due to the lateral diffusion and oxidation of oxidant, silicon is consumed by oxidant and the width of the silicon structure will be reduced to nano range when we remove the silicon dioxide. The factors affecting the ratio of vertical and lateral oxidation, for example, the gentle slope caused by isotropic oxidation and the inhomogeneity of the sidewall of silicon nano-wire, are discussed at last. Our results should be useful in generating silicon–based nanospintronics devices with careful selection of the oxide parameters.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

565-568

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.565

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Online since:

June 2011

Authors:

Xiao Fei Wang, Yu Fei Zhang, Kan Yu, Xiao Mei Yu

Keywords:

Lateral Diffusion, Nanospintronics Devices, Silicon Nano-Wire, Thermal Oxidation

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