Research of Curved Artificial Compound Eyes Based on MEMS Technology

Qing He; Jing Quan Liu; Chun Sheng Yang

doi:10.4028/www.scientific.net/KEM.483.407

Paper Titles

A Research on Implantable Microelectrodes for EMG Signal Acquisition
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A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer
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Design and Test of a Self-Oscillating Driving ASIC for a Low-Q Gyroscope Based on PI Controller
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Design and Development of the Shrapnel-Borne Meteorological Exploration System Based on MEMS
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Research of Curved Artificial Compound Eyes Based on MEMS Technology
p.407

Macro Machined Photoacoustic Non-Resonant Cell
p.411

Research of the Hadamard Multiplex Advantages Using a Programmable Micro-Mirror in a Near-Infrared Spectrometer
p.417

A High-Performance Fourth-Order Sigma-Delta Micromachined Accelerometer
p.422

A Micro-Optical Transceiver for Interferometric Fiber Optic Gyroscope
p.427

HomeKey Engineering MaterialsKey Engineering Materials Vol. 483Research of Curved Artificial Compound Eyes Based...

Research of Curved Artificial Compound Eyes Based on MEMS Technology

Abstract:

This paper studies the fabrication of curved surface artificial compound eyes and application in the optical imaging system. At present, the planar artificial compound eyes imaging system has narrow field of view angle because of its flat array structure of compound eyes. The preparation process of some existed curved surface artificial compound eyes is very complex and is very difficult to guarantee their exact curvature of the substrate. This paper presents a new method to fabricate the curved artificial compound eyes precisely based on MEMS technology The base diameter of the compound eye lens surface is 8mm and the height is 3mm, which includes thousands of compound eyelet. The diameter of the eyelet is 170μm, and the height is18μm. We use this curved artificial compound eyes and CCD imaging sensor assembly,aside from the impact of edge effects,we get the multi-angle and multi-dimensional photography to one object in the center of the imaging area. Therefore, the curved artificial compound eyes optical imaging system has a strong advantage in the dynamic spatial orientation.