Defect Structure in (Zn,Mg)O Films Prepared on YSZ Substrate

Haruki Ryoken; Isao Sakaguchi; Naoki Ohashi; Yutaka Adachi; Takeshi Ohgaki; Shunichi Hishita; Hajime Haneda

doi:10.4028/www.scientific.net/KEM.320.103

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 320Defect Structure in (Zn,Mg)O Films Prepared on YSZ...

Defect Structure in (Zn,Mg)O Films Prepared on YSZ Substrate

Abstract:

The defect structure of undoped ZnO and (Zn1-x,Mgx)O solid-solution films were deposited on YSZ substrate with pulsed laser deposition (PLD) to investigate defect equilibria in those films. In particular, the effects of thermal treatment on the structures and prosperities of (Zn1-x,Mgx)O solid-solution films were examined. The films with high MgO concentration (x>0.12) decomposed to the wurtzite-type and rock-salt-type phase after thermal treatment, indicating that the solubility limit of Mg was about x=0.12 and the wurtzite-type (Zn,Mg)O films with x>0.12 were indicated to be non-equilibrium ones. The subsequent analyses of oxygen diffusivity in those films revealed that the films under non-equilibrium state, i.e., wurtzite-type (Zn1-x,Mgx)O with x>0.12, contained significantly high concentration of anion defects.

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Periodical:

Key Engineering Materials (Volume 320)

Pages:

103-106

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.320.103

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Online since:

September 2006

Authors:

Haruki Ryoken, Isao Sakaguchi, Naoki Ohashi, Yutaka Adachi, Takeshi Ohgaki, Shunichi Hishita, Hajime Haneda

Keywords:

Pulsed Laser Deposition (PLD), Secondary Ion Mass Spectroscopy (SIMS), Solid Solubility Limit, Zinc Oxide (ZnO)

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