Study on the Finishing Process for the Aluminum Nitride Substrates

Zhao Zhong Zhou; Ju Long Yuan; Bing Hai Lv

doi:10.4028/www.scientific.net/AMR.69-70.282

Paper Titles

Optimization Design of Electrical and Magnetic Characteristics of an Ultra-Precision Machine Tool Motorized Spindle
p.258

Simulation and Analysis of Planetary Precise Ball Lapping Mode
p.265

A Method of Parameters Estimation of Water-Lubricated Hybrid Journal Bearings for Ultra-Precision Machine Tool Spindle
p.270

Processing of WC-Co Cemented Carbide Balls by Rotated Dual-Plates Lapping Machine
p.277

Study on the Finishing Process for the Aluminum Nitride Substrates
p.282

Lapping of WC-Co Cemented Carbide Ball by Eccentric Dual-Rotating V-Groove Lapping Mode
p.287

On the Characteristic Parameters of the Semi-Fixed Abrasive Plate
p.291

Simulation of Temperature Field of Oil Film in Super-High Speed Hybrid Journal Bearing Based on FLUENT
p.296

Cutting Force Empirical Model of High-Speed Precision Hard Cutting GCr15
p.301

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 69-70Study on the Finishing Process for the Aluminum...

Study on the Finishing Process for the Aluminum Nitride Substrates

Abstract:

Aluminum nitride (AlN) ceramic has excellent electrical insulation and dielectric properties. The ultra-precision lapping and polishing techniques for the AlN substrate are studied in this paper, and the influence of the lapping parameters such as load and slurry on the surface roughness, material removal rate of AlN is discussed. The surface of workpiece after processing is observed with microscope to analyze the material removal mechanism. An extremely smooth surface with roughness 6nm Ra is obtained after the finishing process. It is also found that the gap between grains will decrease the precision and quality of AlN substrate.