High-Aspect-Ratio and Self-Sensing Probe for AMF Based on Micro-Fabrication

Gao Fa He; Wei Gao

doi:10.4028/www.scientific.net/AMR.317-319.1645

Paper Titles

Effect of Structure on the Performance of Electrostatic MEMS Actuator
p.1627

Design of Proof Mass and System-Level Simulation of a Micromachined Electrostatically Suspended Accelerometer
p.1631

Micro Electroformed Ni-P Alloy Parts by extended UV-LIGA Technology
p.1635

Fabrication of Nano Logic Gates Based on ZnO Nanowires
p.1640

High-Aspect-Ratio and Self-Sensing Probe for AMF Based on Micro-Fabrication
p.1645

Graph-Based Manufacturing Flow Generating Method for Micro Device
p.1649

Physical Compensation of Quadratic Phase Aberrations in Practical Digital Holographic Systems
p.1654

Micro Louvers for Micro and Nano-Satellites Thermal Control
p.1658

Study on Real-Time Compensation RTCP Module of Five-Axis CNC System
p.1662

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 317-319High-Aspect-Ratio and Self-Sensing Probe for AMF...

High-Aspect-Ratio and Self-Sensing Probe for AMF Based on Micro-Fabrication

Abstract:

The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever’s dynamic and static performance.

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Periodical:

Advanced Materials Research (Volumes 317-319)

Pages:

1645-1648

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.317-319.1645

Citation:

Cite this paper

Online since:

August 2011

Authors:

Gao Fa He, Wei Gao

Keywords:

Atomic Force Microscope (AFM), Finite Element Model (FEM), Micro-Fabrication, Scanning Probe

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