[1]
M.Y. Ali and Y.W. Loo, Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach, J. Microsystem Technol., Vol. 13 (2007), 103-107.
DOI: 10.1007/s00542-006-0254-4
Google Scholar
[2]
D. Grogg, N.D.B. Ciressan, A.M. Ionescu, Focused ion beam based fabrication of micro-epectro-mechanical resonators, J. Microsystem Technol., Vol. 14 (2007), 1049-1053.
DOI: 10.1007/s00542-007-0464-4
Google Scholar
[3]
S. W Youn, C. Okuyama, M. Takahashi, R. Maeda, A study on fabrication of silicon mold for polymer hot-embossing using focused ion beam milling, J. of Materials Processing Technology 20I., Vol. 20 (2008), 548-553.
DOI: 10.1016/j.jmatprotec.2007.11.180
Google Scholar
[4]
S. P Thomas, S. Thomas, S. Bandyopadhyay, Mechanical, atomic force microscopy and focused ion beam studies of isotactic polystyrene/titanium dioxide composites, J. Composites Part A, Vol. 40 (2009), 36-44.
DOI: 10.1016/j.compositesa.2008.10.005
Google Scholar
[5]
C.K. Malek, F.T. Hartley, J. Neogi, Fast prototyping of high-aspect ratio, high resolution X-ray masks by gas assisted focused ion beam, J. of Microsystem Technologies., Vol. 9 (2003), 409-412.
DOI: 10.1007/s00542-002-0215-5
Google Scholar
[6]
S. Zaefferer, S.I. Wright, D. Raabe, Three dimensional orientation microscopy in a focused ion beam-scanning electron microscope: a new dimension of microstructure characterization, J. Metallurgical and Materials Transactions A., Vol. 39 A (2008).
DOI: 10.1007/s11661-007-9418-9
Google Scholar
[7]
T.L. Matteson, S.W. Schwarf, E.C. Houge, B.W. Kempshall, L.A. Giannuzzi, Electron backscattering diffraction investigation of focused ion beam surface, J. of Electronic Materials, Vol. 31, No. 1, (2001), 33-39.
DOI: 10.1007/s11664-002-0169-5
Google Scholar
[8]
H. Gerdes and H.H. Gatzen, Focused ion beam core drilling for stress detection in thin-films, Microsyst. Technol., 2008, DOI 10. 1007/s00542-008-0649-5.
DOI: 10.1007/s00542-008-0649-5
Google Scholar
[9]
D. P Adams, M.J. Visile, V.C. Hodges, N. Patterson, Focused ion beam fabrication of nanopores in metal and dielectric membranes, Microsc Microanal, Vol 13 (Suppl 2) (2007), 1512-1513.
DOI: 10.1017/s1431927607078038
Google Scholar
[10]
A.J. Kubis, G.J. Shiflet, D.N. Dunn, R. Hull, Focused ion beam tomographic, J. of Metallurgical and Materials Transactions A, Vol. 35 A (2004), 1935-(1943).
DOI: 10.1007/s11661-004-0142-4
Google Scholar
[11]
J. Lian., The focused-ion-beam microscope-More than a precision milling, JOM: Overview of Elctron Micrscopy, (2006), 27-31.
DOI: 10.1007/s11837-006-0156-z
Google Scholar
[12]
L.A. Giannuzzi, D. Phifer, N.J. Giannuzzi, M.J. Capuano, Two-dimensional and 3-dimensional analysis of bone/dental implant interfaces with the use of focused ion beam and electron microscopy, J. Oral Maxillofac. Surg., (2007), 737-747.
DOI: 10.1016/j.joms.2006.10.025
Google Scholar
[13]
C.C. Ooi, K.H. Siek, K.S. Sim, Applications of focused ion beam system as a defect localization and root cause analysis tool, Proc. Of 8th IPFA, Singapore, (2001), 112-116.
DOI: 10.1109/ipfa.2001.941466
Google Scholar
[14]
Y. Fu and N.K.A. Bryan, Fabrication of three-dimensional microstructures by two-dimensional slice by slice approaching via focused ion beam milling, J. of Vac. Sci. Technol. B., Vol. 22, No. 4 (2004), 1672-1678.
DOI: 10.1116/1.1761460
Google Scholar
[15]
A. Uranga, F. Ay, J.D.B. Bradley, R.M.D. Ridder, K. Worhoff, M. Pollnau, Focused ion beam nano-structuring of photonic Bragg gratings in Al2O3 waveguides, Proc. Symposium IEEE/LEOS Benelux Chapter, Brussels, (2007), 247-250.
DOI: 10.1364/cleo.2010.cmq4
Google Scholar
[16]
M.Y. Ali, N.P. Hung, B.K.A. Ngoi, S. Yuan, Sidewall surface roughness of sputtered silicon II: Model verification, IoM Communications Ltd, Institute of Materials, Minerals and Mining, (2003), 104-108.
DOI: 10.1179/026708403225002522
Google Scholar
[17]
M.Y. Ali, N.P. Hung, B.K.A. Ngoi, S. Yuan, Sidewall surface roughness of sputtered silicon I: Surface modelling, IoM Communications Ltd, Institute of Materials, Minerals and Mining, (2003), 97-103.
DOI: 10.1179/026708403225002513
Google Scholar
[18]
N.P. Hung, Y.Q. Fu, M.Y. Ali, Focused ion beam machining of silicon, J. of Materials Processing Technology, Vol. 127 (2002), 256-260.
DOI: 10.1016/s0924-0136(02)00153-x
Google Scholar
[19]
Y.Q. Fu, N.K.A. Bryan, O.N. Shing, N.P. Hung, Influence of redeposition effect for focused ion beam 3D micromachining in silicon, Int. J. Adv. Manuf. Technol., Vol 16 (2000), 1049-1053.
DOI: 10.1007/s001700070005
Google Scholar