Investigation of Uncertainty Sources of Piezoresistive Silicon Based Stress Sensor

Alicja Palczynska; Florian Schindler-Saefkow; Przemyslaw Gromala; Kerstin Kreyßig; Sven Rzepka; Dirk Mayer; Tobias Melz

doi:10.4028/www.scientific.net/AMM.807.45

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Fluid-Structure Interaction Simulation of an Aortic Phantom with Uncertain Young's Modulus Using the Polynomial Chaos Expansion
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 807Investigation of Uncertainty Sources of...

Investigation of Uncertainty Sources of Piezoresistive Silicon Based Stress Sensor

Abstract:

The aim of this paper is to get insight into measurement uncertainties for thermomechanical measurements performed using a piezoresistive silicon-based stress sensor in a standard microelectronic package. All used sensors have the same construction, were produced in the same technological processes at the same time, yet the measurement results show significant distribution. The possible causes for this phenomenon are discussed in this paper. Additionally, Finite Element Method (FEM) model is created and validated, what enables a study of sensitive parameters influencing the measurement uncertainties.

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Periodical:

Applied Mechanics and Materials (Volume 807)

Pages:

45-54

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.807.45

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Online since:

November 2015

Authors:

Alicja Palczynska*, Florian Schindler-Saefkow, Przemyslaw Gromala, Kerstin Kreyßig, Sven Rzepka, Dirk Mayer, Tobias Melz

Keywords:

Measurement Uncertainties, Sensitivity Analysis, Stress Sensor

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