Fabrication of Au Micro-Electrodes on Polyimide Films Using Transfer Printing Techniques

Takayuki Komori; Tatsuya Kosugi; Hirofumi Saito; Keigo Kuroda; Masahiro Satano; Hiroki Komatsuzaki; Ryuta Ikoma; Yasushiro Nishioka

doi:10.4028/www.scientific.net/AMM.300-301.1368

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Experimental Study on the Fatigue Properties and Reliability for the Steel of Elastic Oil Sump
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 300-301Fabrication of Au Micro-Electrodes on Polyimide...

Fabrication of Au Micro-Electrodes on Polyimide Films Using Transfer Printing Techniques

Abstract:

Transfer printing of Au micro-electrode patterns onto a polyimide (PI) film was investigated, and the optimum transfer conditions were obtained. Here, the line and space patterns with widths of 25 μm and 100 μm were successfully transfered on polyimide films at a molding temperature of 150 °C for 3 min under the molding pressure of 2.5 MPa. This technique is expected to provide simplified processes to fabricate electrode patterns on microelectro mechanical systems (MEMS).

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Periodical:

Applied Mechanics and Materials (Volumes 300-301)

Pages:

1368-1371

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.300-301.1368

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Online since:

February 2013

Authors:

Takayuki Komori, Tatsuya Kosugi, Hirofumi Saito, Keigo Kuroda, Masahiro Satano, Hiroki Komatsuzaki, Ryuta Ikoma, Yasushiro Nishioka

Keywords:

Au, Electrode Pattern, Micropump, Polyimide, Transfer Printing

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