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摘要:
为了实现大靶面、大变倍比显微成像并解决同轴柯勒照明高集成度设计的问题，本文提出了一种基于同轴柯勒照明的大变倍比紧凑型显微镜光学系统的设计方法。首先，对望远镜和显微镜连续变倍光学系统的成像原理进行了分析，并对正组补偿式变倍显微镜光学系统的设计原理进行了理论分析。然后，我们提出把前固定组分解为准直组和汇聚组并在两镜组间设计分光镜，并通过共用透镜组实现同轴柯勒照明系统的紧凑型设计。最后，对大靶面连续变倍显微镜系统和与之匹配的同轴柯勒照明光学系统进行了设计，设计结果表明显微成像光学系统的变倍比为10×，工作距离为60 mm，物方最高分辨率为1.75 µm，同轴照明均匀性为94.3%。该系统具有成像质量好、畸变小、变倍曲线平滑、体积小巧等特点，从而验证了该设计方法的可行性。
Abstract:In order to achieve a large image plane and large zoom ratio in microscopic imaging and solve the problem of the high integration of coaxial Kohler illumination, this paper proposes a design method for a compact optical system with a large zoom ratio based on coaxial Kohler illumination. First, the imaging principle of the continuous zoom optical system of telescopes and microscopes was analyzed, and the design principle of the positive group compensation zoom microscope was analyzed theoretically. Then, the front fixed group was divided into a collimation group and a convergence group, and a beam splitter prism was designed between the two lens groups to achieve a compact coaxial Kohler illumination optical system design by sharing lens groups. Finally, the continuous zoom microscope with a large image plane and the matched coaxial Kohler illumination optical system are designed. The design results show that the zoom ratio of the microscope optical system is 10×, the working distance is 60 mm, the highest resolution of the object side is 1.75 µm, and the coaxial illumination uniformity is 94.3%. The designed microscope has excellent imaging quality, minimal distortion, a smooth zoom curve, and a compact size, verifying the feasibility of the design method.
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图 1 正组补偿变倍成像原理图
Figure 1. Imaging principle diagram of the positive group compensation zoom optical system
图 10 柯勒照明光学系统结构参数图
Figure 10. Structural parameter diagram of the Kohler illumination optical system
图 12 变倍显微镜总体光路图（β=−0.6）
Figure 12. Overall optical path diagram of the zoom microscope
表 1 变倍显微镜光学系统设计指标
Table 1. Zoom microscope optical system design index
参 数 数 值 变倍比 10× 放大率 −0.6~−6.0 工作距/mm 60 工作波段/nm 480~660 相机分辨率/pixel 2448×2048 像素尺寸/µm 3.45×3.45 照明方式 同轴柯勒照明 
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表 2 四组元的初始焦距
Table 2. Focal lengths of the four groups in the initial structure
组元 前固定组 变焦组 补偿组 后固定组 焦距/mm 40.7 −29.3 54.4 1001.9
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表 3 四组元之间的间距
Table 3. Spacing between the four groups
组元距离 −l1/mm d12/mm d23/mm d34/mm l4ʹ/mm β=−0.6 60.0 36.02 98.06 36.75 49.17 β=−1.5 60.0 51.88 53.13 65.82 49.17 β=−6.0 60.0 82.53 3.20 85.10 49.17
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表 4 变倍显微镜物方分辨率
Table 4. Object-side resolution of the zoom microscope
放大倍率 物方NA 物方分辨率 β=−0.6 0.038 9.0 µm β=−1.5 0.073 4.6 µm β=−6.0 0.192 1.75 µm
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表 5 变倍显微镜公差分配表
Table 5. Tolerance distribution of the zoom microscope
公差项 数值 光圈/fringe ≤3 元件厚度/mm ±0.02 表面偏心/mm ±0.01 元件倾斜/(°) ±0.01 元件偏心/mm ±0.01 表面不规则度/fringe ≤0.3 折射率 ±0.001 阿贝数/% ±0.5
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