Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
狭ギャップ半導体 InSb 系量子井戸の最近の進展
眞砂 卓史石田 修一外賀 寛崇柴崎 一郎
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2014 年 57 巻 7 号 p. 259-265

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  Narrow-gap III-V compound semiconductors such as InSb and InAs are indispensable materials for highly sensitive magnetic sensors. We have systematically studied transport properties of Al0.1In0.9Sb/InSb and Al0.1In0.9Sb/InAs0.1Sb0.9 quantum wells: the well-width dependence of sheet resistivity, carrier density and mobility. The carrier density and mobility of InAsSb QWs are higher than those of InSb QWs. The InAs0.1Sb0.9 QWs, which lattice mismatch between the well and barrier layers is 0%, shows high mobility regardless of the well width. The calculated band-alignment of these QWs revealed that the bottom of the conduction band of InSb QWs is above the Fermi level, while that of InAs0.1Sb0.9 QWs is under the Fermi level, which leads the differece of the carrier density. We also discussed the doping effect into InSb QWs. The doping improves temperature dependence of the mobility and resistivity.

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