Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
速報
合成樹脂を用いた材料の気体放出速度測定
佐藤 吉博高田 聡大森 隆夫木村 誠宏鈴木 敏一齊藤 芳男
著者情報
ジャーナル フリー

2013 年 56 巻 10 号 p. 422-424

詳細
抄録

  Since materials of plastomer materials of synthetic resin have a large outgassing rate than metals, they are not so suitable for use as uhv components. However, some of the plastomers are often installed in vacuum system, where their low electrical- and thermal-conductivity are required. The outgassing rates were measured for bulk samples of FRP, PEEK and polyimide, and for thin sheets of PET (Aluminum deposited PET film of 9 μm thick.) and polyimide. The outgassing rate is decreased in a manner of t−1/2, indicating diffusion process of absorbed gas molecules from bulk. The rate of sheet, being after several tens hour pumping, shows rapid decrease. The effect of bake-out degassing in vacuum is also examined for bulk plastomers.

著者関連情報
© 2013 一般社団法人日本真空学会
前の記事 次の記事
feedback
Top