Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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気体中の水晶振動子のインピーダンスと周波数の圧力依存性の比較
黒河 明北條 久男小林 太吉
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ジャーナル フリー

2011 年 54 巻 3 号 p. 196-198

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  The vibrating quartz oscillator in the viscous-flow gas was observed to compare the pressure (P) dependence between the impedance change (ΔZ) and the frequency change (ΔF). We obtained the ΔZ and the ΔF for Ar, O2, and Ne gases. Among Ar and O2 both the ΔZs and the ΔFs had no intersection with each other. However, Ne gas had the intersections with Ar gas with the ΔZ(P) and with O2 for the ΔF(P). The phenomenon was caused by the Ne property which Ne has smaller mass but larger viscosity compared with Ar and O2. The ΔZ-ΔF property showed that the property of each gas lied in the viscosity descending order, i.e., Ne, Ar, O2. The measurement of (ΔZ, ΔF) property could give the viscosity related information.

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© 2011 一般社団法人日本真空学会
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