Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
硬質 c-BN 膜の切削工具への応用
野間 正男
著者情報
ジャーナル フリー

2010 年 53 巻 12 号 p. 765-772

詳細
抄録

  The c-BN (cubic boron nitride) has a property of very high hardness and very low friction. Therefore, the application for cutting tool had studied during many enterprises for long time. But they hadn't gotten strong adhesive thin films to the substrates.
  The c-BN thin films were prepared by magnetically enhanced plasma ion plating (MEP-IP). These thin films were inserted the intermediate layers and were prepared functionally gradient BN films. The results were gotten very strong adhesion to the substrates. The gained properties of the thin films were the hardness of about 5,400 HK (Knoop hardness) and the friction coefficient of about 0.12. That rate of the deposition was 0.7 µm/h.

著者関連情報
© 2010 一般社団法人日本真空学会
前の記事 次の記事
feedback
Top