精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
高真空対応型静圧空気ジャーナル軸受の排気システムに関する研究
吉本 成香吉田 雄一檀原 伸補三上 喜秋岩崎 健一
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2002 年 68 巻 4 号 p. 597-601

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This paper investigates the availability of aerostatic journal bearings to a high vacuum chamber, theoretically and experimentally. This bearing has several steps of a viscous seal, and vacuum pumps are connected to the space between viscous seals in order to achieve the vacuum degree of less than 10-3 Pa in a vacuum chamber. The vacuum degree of a chamber is affected by many design parameters such as the number of steps of a viscous seal, seal length, seal gap, the pumping speed of vacuum pumps and the conductance of exhaust tubes. Influences of these design parameters on the vacuum degree are theoretically discussed and the theoretical predictions are compared with the experimental data. It is found that the aero-static journal bearing with viscous seals can achieve the vacuum degree of the order of 10-4 Pa in a vacuum chamber by properly designing the seal regions.

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