精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
レーザ照射による水中へのダイヤモンドライクカーボン徴粒子の合成
比田井 洋史戸倉 和
著者情報
ジャーナル フリー

2002 年 68 巻 8 号 p. 1072-1076

詳細
抄録

Chemical vapor deposition (CVD) is one of the most popular film deposition methods on solid substrates. We propose a new powder synthesis method utilizing CVD process, that uses a liquid instead of a solid as a substrate. The gas close to the liquid surface and/or dissolved in the liquid was decomposed by laser irradiation and particles were synthesized. Water was used as a liquid, because of its large solubility. Diamond like carbon particles were synthesized by ArF excimer laser irradiation to the methane dissolved in water. Grain size of the particle synthesized from the gas close to the liquid surface was 50-200nm, and that from the gas dissolved in the water was 200-700nm. Grain size could be varied with laser power. Energy dispense spectroscopy (EDS) clarified that the powder mostly consisted of carbon, and oxygen and nitrogen could not detected. High resolution transmission electron microscope (HR-TEM) and electron diffraction revealed that the powder was composed of diamond like carbon (DLC) and multiwall carbon nanotube was grown on the DLC

著者関連情報
© 社団法人 精密工学会
前の記事 次の記事
feedback
Top