In the previous report, the inchworm movement method using fine and coarse positionings was proposed by the authors. The experiment results showed that the inchworm movement method positioning had an over 100 mm stroke with 2.5 nm resolution and no backlash, and that the positioning was valid not only for point to point (PTP) control but also for continuous path (CP) control. However, there was interference between fine and coarse positionings, fine position error resulting from coarse positioning velocity discontinuity, when positioned by CP control. In this report, the new CP positioning algorithm of the inchworm movement method, in which coarse positioning command is continuous in velocity, has been proposed. The software servo that fine and coarse positionings are moved together by a new inchworm movement method algorithm makes it possible to reduce the interference.