精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
レーザビーム伝送制御システムの開発
木村 盛一郎村上 伸西村 哲郎池田 正幸
著者情報
ジャーナル フリー

1995 年 61 巻 1 号 p. 107-111

詳細
抄録

A laser beam delivery control system has been designed to align a laser beam axis and monitor its beam properties such as beam position, beam diameter, power, peak power and 3-D profile. A laser machining system for long term operation will make this system necessary because those beam qualities will be changed. The developed system is composed of two beam sensors, two angle control bending mirrors with actuators, and a host controller. A rotating wire method was applied for this sensor. In this system, the accuracy of the beam diameter was ±0.5 mm compared with the measurement from a burn pattern of acrylic resin. A far-field laser beam position of 17 m away from an oscillator could have been measured and controlled automatically within an accuracy of ±1 mm under on-line conditions. Thus this developed system is very promising for evaluating beam qualities.

著者関連情報
© 社団法人 精密工学会
前の記事 次の記事
feedback
Top