精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
機能性セラミックスのマイクロ波焼結
福島 英沖渡辺 吾朗松居 正夫
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1992 年 58 巻 1 号 p. 75-80

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The feasibility of microwave sintering of electronic ceramics was investigated using a heating control system. This system comprises a klystron amplifier with 6 GHz band, a single mode rectangular cavity for sintering ceramics, and a controller for operating the heating condition. Eight kinds of electronic ceramic powders, Al2O3, AlN, TiO2, stabilized ZrO2, ZnO, PZT, PLZT, and BaTiO3, were prepared as test samples. These powders were compacted into a cylindrical form of 6.6 mm diameter, followed by cold isostatic pressing (CIP). Then, they were sintered in the cavity with either air or nitrogen gas. ZnO and stabilized ZrO2 were easily sintered in air, and their densities were the same as the theoretical densities. Especially, ZnO could achieve a high density of over 95% of the theoretical with a sintering time of only 5 sec. On the other hand, the microwave sintering of PZT, PLZT, and BaTiO3 was difficult because uneven heating and melting occurred due to thermal runaway. However, by covering the samples with a silicon carbide tube, the thermal runaway could be prevented. The sintered PZT had uniform microstructure with over 98% of the theoretical density.

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