In order to apply graphene to biosensor and gas sensor, it was fabricated on oxide single crystal substrate with Cu catalytic metal. A Cu thin film was deposited on a c-sapphire and (100) MgO single crystal substrate by a sputtering method. When Cu was sputter deposited on a sapphire substrate at a substrate temperature of 600 ° C., a (111) oriented Cu thin film grew. When Cu was sputtered on a MgO substrate at a substrate temperature of 600 ° C., a (100) oriented Cu thin film grew. Next, graphene was grown on the substrate with Cu thin film by thermal CVD method. It was confirmed that single-layer graphene was growing by Raman spectroscopy.