Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3Pa3-4 Thickness shear mode BAW resonator based on epitaxial (1012) LiNbO3 / (1120) AZO / (1012) Al2O3
Shinya Kudo, Takahiko Yanagitani
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2022 Volume 43 Pages 371-

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