Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3Pa3-2 Growth of polarity inverted SiAlN/AlN multilayered films and applications to high-order mode BAW resonators
Jun Sekimoto, Masashi Suzuki, Shoji Kakio
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2021 Volume 42 Article ID: 3Pa3-2

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