RF Electron-Beam-Driven Plasma Radiation Source for EUV Lithography and High Resolution Radiography of Containment Vessels
- Los Alamos National Laboratory
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 770485
- Report Number(s):
- LA-CRADA-97-11; LA-CRADA-97-0011; CRADA No. LA93C10102
- Country of Publication:
- United States
- Language:
- English
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