In the area of precision manufacturing, there is an increasing demand for high-speed, non-contact optical surface roughness measurement. White light interferometry is a dominant technology to generate quantitative 3D images of surfaces. White light interferometry, also known as coherence scanning interferometry (CSI), is classified in Part 604 of ISO25178-6 (2010):Geometrical Product Specifications methods for measuring surface texture (GPS) ‒Surface texture: Areal ‒Part 6: Classification of methods for measuring surface texture. Coherence scanning interferometry provides quantitative maps of the surface topography for a million image points in a few seconds. This paper describes the basic technique and the latest technical trend for tribological surface structure analysis.