In the semiconductor manufacturing processing, the ultra-precision positioning technique is essential. We have been developing ultra-precision positioning stage systems and drive actuators mounted on those devices, and supplying them into the semiconductor market for more than 20 years. In this paper, we, firstly, describe our basic study of the driving method and control techniques to actualize the high-precision positioning. Secondly, we introduce a technique for designing linear motor and pneumatic servo actuator which has been recognizing to achieve ultra-precision positioning accuracy. Furthermore, we discuss current and future issues of XY stage system applied for semiconductor wafer. Finally, we introduce an example of the development of the pneumatic servo stage technology applied for electron beam exposure system.