プラズマ・核融合学会誌
Print ISSN : 0918-7928
解説
プラズマ吸収プローブによるプロセスプラズマの電子密度測定
菅井 秀郎
著者情報
ジャーナル フリー

2002 年 78 巻 10 号 p. 998-1006

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This paper reviews a novel and simple technique for measuring electron density using a plasma absorption probe (PAP). The PAP enables the measurement of local absolute electron density even when the probe surface is soiled with processing plasmas. The technique relies on the absorption of surface waves (SWs) resonantly excited around the probe head at critical frequencies which depend on the electron density. The PAP consists of a small antenna connected to a coaxial cable and is enclosed in a tube of dielectric constant εd inserted in a plasma of electron plasma frequency ωp. A network analyzer feeds a rf signal to the antenna and displays the frequency dependence of the power absorption. A series of resonant absorptions is observed at frequencies slightly above the SW resonance frequency, ωSW = ωp/(1+εd)½, which allows us to determine the electron density. Typical examples of measured PAP data and future challenges are presented.

著者関連情報
© 2002 by The Japan Society of Plasma Science and Nuclear Fusion Research (Japanese)
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