Multi Contact Points Slider for A Surface Acoustic Wave Motor

IEEJ Transactions on Sensors and Micromachines

Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939

Multi Contact Points Slider for A Surface Acoustic Wave Motor

Minoru Kurosawa, Makoto Chiba, Toshiro Higuchi

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Keywords: Micro actuator, Ultrasonic motor, Surface acoustic wave, Piezoelectric actuator, Friction drive

JOURNAL FREE ACCESS

1997 Volume 117 Issue 8 Pages 430-431

DOI https://doi.org/10.1541/ieejsmas.117.430

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