Cathodoluminescence (CL) obtained from the surface of chemical vapor deposited diamond is studied. The foreign adsorbed atoms of diamond surfaces vary not only the electrical properties but also CL properties. CL intensity of oxidized surface is lower than that of hydrogenated surface because the existence of surface states promote the surface recombination of electrons and holes. However, it is also shown that fluorination of the oxidized surface recovers the CL intensity of diamond surface through reduction of surface states.