ITO(Indium-Tin-Oxide) has been now widely used as the transparent anode for organic light-emitting devices(OLEDs). We used various methods of ITO surface treatment and examined the effects of them by measuring contact angle and calculating surface energy. We also prepared OLEDs with ITO treated by each method, and estimated their characteristics. The surface of ITO treated by UV-O₃ or O₂-plasma was more hydrophilic than that treated by only organic rinse or no treatment, and consequently the characteristic of the OLED was improved. We suppose these treatments affect the hole injection from ITO into organic layer, due to ionization potential or surface cleanness. We also investigated time degradation of NPD films on the ITO substrates. The films deposited with high deposition rate porycrystallized faster.