Abstract of annual meeting of the Surface Science of Japan
[volume title in Japanese]
Session ID : 27FGp06
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November27
Development of low vacuum generation system for the pressure and the flow rate in the range of 1 Pa-133 Pa
*SEUNG-SOO HONG, KHAN WAKIL, HAN-WOOK SONG
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CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]

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© 2013 The Surface Science Society of Japan
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