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Conferences > FiO > 2023 > FM6D > FM6D.3

Gigahertz phononic integrated circuits based on overlay slot waveguides

Ziyao Feng, Yang Liu, Xiang Xi, Lai Wang, and Xiankai Sun

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Abstract

We propose and experimentally demonstrate a type of overlay slot phononic waveguides, and the guiding and power splitting of gigahertz surface acoustic waves in such waveguides with a measured propagation loss of 1.80 dB/mm.

© 2023 The Author(s)

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