日本機械学会論文集 B編
Online ISSN : 1884-8346
Print ISSN : 0387-5016
プラズマCVDにおけるカーボンナノチューブ成長モードの圧力依存性(熱工学,内燃機関,動力など)
野崎 智洋唐津 拓也大西 空摩岡崎 健
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ジャーナル フリー

2009 年 75 巻 756 号 p. 1662-1668

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A pressure-dependent transition (5kPa-100kPa) of carbon nanotube (CNT) morphology in plasma enhanced chemical vapor deposition (PECVD) is presented. High-purity, vertically-aligned single-walled CNTs (SWCNTs) were synthesized only when PECVD was used at atmospheric pressure, while multi-walled CNTs were preferentially synthesized when the total pressure was lower than 20kPa. In the reduced pressure range, nanostructured catalysts were easily coagulated at the initial stage of CNT nucleation even if an excess supply of reactive species and high-energy ion bombardment were absent. If catalyst coagulation was avoided at the moment of CNT uncleation, SWCNTs were grown in the root growth regime even at 5kPa; however, the top CNT layer was contaminated by amorphous carbon, produced as a result of excess supply of reactive species.

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© 2009 社団法人日本機械学会
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