機械材料・材料加工技術講演会講演論文集
Online ISSN : 2424-287X
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322 プラズマ CVD 法によるアモルファス炭素膜の合成と電気的特性の評価
岩重 景青木 佑一大竹 尚登
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p. 207-208

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In this study, we investigated electrical properties of amorphous carbon (a-C : H) films fabricated by plasma CVD. First, photovoltaic cells consisting of Au/ a-C : H films / n-Si (p-Si) /In-Ga films were fabricated with changing deposition condition. Deposition of a-C"H films were performed using methane as a source gas. Nitrogen and tri-methyl boron (TMB) were also used as the doping gases. Under the light illumination (Xe are lamp at 100mW/cm^2), this cell shows photovoltaic behavior with short circuit current of 0.3mA/cm^2,open circuit voltage of 0.3V and energy conversion efficiency of 0.023%. Secondly, we investigated field emission from a-C : H on ITO films. The film shows field emission at the surface potential barrier of 4∿4.5eV.

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© 2003 一般社団法人 日本機械学会
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