Recently, it has been confirmed that submicrometer spherical particles can be produced by irradiating a pulsed laser to raw nanoparticles dispersed in liquid. The particles produced by this method are expected to have various applications such as lubricants in the mechanical field, but various mechanical properties of single particle when load is applied to one particle are unknown. In this study, compression tests of submicrometer spherical particles were performed using SEM nanoindenter to measure the mechanical properties of these particles. As a result, it becomes clear that the compressive behavior differs depending on the materials of particles and substrates. The relationship between the particle-substrate combination and the compression behavior will be discussed, especially focusing on the particle embedment behavior by compressive force application with B4C and TiC submicrometer spherical particles.