主催: 一般社団法人 日本機械学会
会議名: 第11回生産加工・工作機械部門講演会
開催日: 2016/10/22 - 2016/10/23
Hydrostatic bearings have been widely applied to ultra-precision machine tools and measuring equipment because of their high load carrying capacity, high stiffness and high accuracy of motion. Generally, these hydrostatic bearings uses fixed restrictors such as capillary, orifice etc. to feed pressurized oil into the bearing clearance. Additionally, in a case of nanometer-order of machining or measuring accuracy is required for these equipment, a self-controlled restrictor is used to achieve nearly infinite bearing stiffness. In this paper, an actively-controlled hydrostatic thrust bearing using an elastic hinge and a voice coil motor was proposed, and the static and dynamic characteristics of the proposed bearing were investigated experimentally. It was consequently found that the proposed bearing could achieve very high static stiffness