Neutron analysis technique using neutron focusing mirrors are highly demanded for basic researches of high tensile strength steel sheets, proteins and polymer materials. Although we proposed a new fabricating method of multi-segmented neutron focusing mirrors using metal substrates, it was difficult to measure surface profile precisely. This paper reports a development of non-contact fast speed on-machine measurement probe in order to measure the fabricated mirror profile and results of the profile measurement of super mirrors deposited on polished substrates.
