About micro-tweezers consisting of two beams as a handling part, we examined handling characteristics by finite element analysis. Purpose is to clarify what shape of the handling part is good for handling stability. Examined factors are handling force, friction coefficient, and contact condition. The handling characteristics do not change on the handling force and the fiction coefficient so much substantially. It seems that the reason is small contact area. Therefore, it is important to make the contact area large by preventing the contact surface of the micro-tweezers from inclining in handling operation. It is one method to optimize length of the handling beam and handling force.