年次大会講演論文集
Online ISSN : 2433-1325
セッションID: 3945
会議情報
3945 高分子薄膜の音響物性値を測定するための音響共鳴顕微鏡法(S21-1 強度物性評価法,S21 ナノ・マイクロ構造体の強度物性と信頼性)
燈明 泰成今泉 卓也坂 真澄
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会議録・要旨集 認証あり

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Acoustic resonant spectroscopy technique for measuring the acoustic impedance, ultrasonic velocity and density of micron-scale polymer films is developed. The method observes the acoustic resonance between water, film and the tungsten plate at the frequency range of 20-70MHz, where the interface between the examined film and the plate is vacuum-sealed, and it enables us to characterize a low-density polyethylene film with low acoustic impedance of about 1.9MNm^<-3>s and a poly (vinyl chloride) film as thin as about 8μm.

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