In the previous report, the possibility of ultra-smooth grinding of fine ceramics with # 140 mesh metal bond diamond wheel was ascertained. In this paper, the effect of step feed parallel to grinding direction on surface roughness of ground silicon carbide ceramic (HPSC) is examined. It is found that the parallel step feed has large effect on the surface roughness. In addition, the surface roughness of silicon carbide ceramic formed by using suitable grinding conditions can attain to below within 22nm (Rz).