Fracture behavior and mechanical integrity of a thin film deposited on substrate should be influenced by basically four parameters, which are strength of the film, strength of the interface, Young's modulus of the film and residual stress in the film, provided that properties of the substrate are given. These parameters were evaluated and compared in this study among the cases of CVD diamond, PVD TiAlN and TiN coatings deposited on cutting tools. Toughness of adhesion was not so much different while toughness of the film was drastically lower for the case of PVD, which resulted in clearly different fracture behavior observed for these coatings.